Theory, Fabrication, and Characterization of Nano & Microelectromechanical Systems (NEMS/MEMS)

ME 419/ 519 (4 [3])

Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.

Restriction: senior standing.



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Office of the Registrar

MSC 11 6325
1 University of New Mexico
Albuquerque, NM 87131

Phone: (505) 277-8900
Fax: (505) 277-6809