The University of New Mexico

Statistical Design of Experiments for Semiconductor Manufacturing

CHNE 486 / 586 (3)
Essential statistical tools for the collection, analysis, and interpretation of data, as applied to the design and control of processes for semiconductor manufacturing. Basic statistical concepts; simple comparative experiments; analysis of variance; randomization, replication and blocking; full-factorial, fractional factorial, response-surface, nested and split-lot designs, utilization of RS/1 software.

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