Theory, Fabrication, and Characterization of Nano & Microelectromechanical Systems (NEMS/MEMS)

NSMS 519 (4 [3])

(Also offered as ECE, ME 519)

Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.