Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)
NSMS 519 (4)(Also offered as ECE, ME 519)
Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.
Prerequisites / Corequisites
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Office of the Registrar
MSC 11 6325
1 University of New Mexico
Albuquerque, NM 87131
Phone: (505) 277-8900
Fax: (505) 277-6809