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• >Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)

Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)

ECE 519 (4)

(Also offered as ME, NSMS 519)

Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.

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Prerequisites / Corequisites

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