- UNM
- >Catalogs
- >Catalog 2018-2019
- >Courses
- >Nanoscience and Microsystems
- >Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)
(Also offered as ECE, ME 519)
Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.
MSC11 6325
1 University of New Mexico
Albuquerque, NM 87131
(505) 277-8900
Phone: (505) 277-6809
Fax: