Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)
ME 419 / 519 (4)(Also offered as ECE 519; NSMS 519)
Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.
Restriction: admitted to School of Engineering and senior standing.
Prerequisites / Corequisites
[]
Course Search:
Keyword Search:
Office of the Registrar
MSC11 6325
1 University of New Mexico
Albuquerque, NM 87131
Phone: (505) 277-8900
Fax: (505) 277-6809