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• >Advanced Micro- and Nanosystems Engineering [Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)]

Advanced Micro- and Nanosystems Engineering [Theory, Fabrication, and Characterization of Nano and Microelectromechanical Systems (NEMS/MEMS)]

ME 519 / 419 (4)

(Also offered as ECE 519; NSMS 519)

Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.

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Prerequisites / Corequisites

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