Theory, Fabrication, and Characterization of Nano & Microelectromechanical Systems (NEMS/MEMS)

ME 519 / 419 (3)

(Also offered as ECE, NSMS 519)

Lectures and laboratory projects on physical theory, design, analysis, fabrication, and characterization of micro and nanosystems. Special attention given to scaling effects involved with operation of devices at nano and microscale.